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owl:sameAs
Inference Rule:
b3s
b3sifp
facets
http://www.w3.org/2002/07/owl#
ldp
oplweb
skos-trans
virtrdf-label
None
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isa:309339579
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An Entity of Type :
prov:Entity
, within Data Space :
webisa.webdatacommons.org
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Type:
prov:Entity
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rdf:type
prov:Entity
prov:value
The phase change material 940 that surrounds side walls of the conductive layer 350 and the insulating layer 340 is anisotropically etched in areas other than the areas covered by the photoresists 1210, 1220.
prov:wasQuotedFrom
google.com
is
prov:wasDerivedFrom
of
isap:167351447
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