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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • The substrate 110 may be various types of materials, including an insulating material, such as glass, sapphire, alumina, or the like, or any semiconductor material, such as silicon, gallium arsenide (GaAs), indium phosphide (InP), or the like.
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