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  • Alternatively, the upper electrodes 28, the lower electrodes 30, and the terminals 34 may be made of a composite of the above metal or alloy and metal oxide such as aluminum oxide, titanium oxide, zirconium oxide, cerium oxide, copper oxide, or the like, or made of an electrically conductive material such as a cermet containing the metal or alloy in which the same material as the material of the p
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