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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • Insulation material, such as SiO2, SiOx, SiN, FSG, BPSG, BSG, low-k material, or other suitable dielectric material is deposited over exposed portions of dielectric material layer 210a and storage location 204 to provide insulation material layer 208b.
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