Aug 18, 2003Jun 15, 2005Sarnoff CorporationPhotonic devices and pics including sacrificial testing structures and method of making the same* Cited by examinerClassifications U.S. Classification250/221, 250/227.14, 318/480, 250/559.4International ClassificationB60R21/01Cooperative ClassificationB60R2021/01027, B60R21/0136European ClassificationB60R21/0136Legal EventsDateCodeEventDescriptionMay 7, 2