6 Aug 200427 Jun 2006Micron Technology, Inc.Shaped polishing pads for beveling microfeature workpiece edges, and associate system and methodsUS707411416 Jan 200311 Jul 2006Micron Technology, Inc.Carrier assemblies, polishing machines including carrier assemblies, and methods for polishing micro-device workpiecesUS71318894 Mar 20027 Nov 2006Micron Technology, Inc.Method for planarizing microelectro