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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • Next, at least one of the first semiconductor layer 12 of the seed substrate 10 or the second semiconductor layer 22 of the support substrate 20 is formed with an insulating film 23 made of silicon oxide or the like having a thickness of for example about 200 to 300 nm.
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