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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • A layer 2 to be patterned is applied on the surface 11 of a substrate 1, for example a semiconductor substrate, in particular a silicon substrate or another arbitrary layer carrier, for example an already processed semiconductor wafer with a multiplicity of deposited and patterned layers.
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