About: isa:350615520   Sponge Permalink

An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

AttributesValues
rdf:type
prov:value
  • es including retaining rings, and methods for planarizing micro-device workpiecesUS6966816May 2, 2001Nov 22, 2005Applied Materials, Inc.Integrated endpoint detection system with optical and eddy current monitoringUS6969306Aug 19, 2004Nov 29, 2005Micron Technology, Inc.Apparatus for planarizing microelectronic workpiecesUS6986699May 8, 2001Jan 17, 2006Applied Materials, Inc.Method and apparatus for
prov:wasQuotedFrom
is prov:wasDerivedFrom of
Alternative Linked Data Views: ODE     Raw Data in: CXML | CSV | RDF ( N-Triples N3/Turtle JSON XML ) | OData ( Atom JSON ) | Microdata ( JSON HTML) | JSON-LD    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3217, on Linux (x86_64-pc-linux-gnu), Standard Edition
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2012 OpenLink Software