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  • Because a rough pump is capable of evacuating a chamber to a pressure of a few milliTorr or higher, a rough pump alone may be employed for applications wherein the chamber 11 is not evacuated below a pressure of a few milliTorr (e.g., when the chamber 11 is vented to atmospheric pressure with a non-oxidizing gas such as nitrogen prior to loading a substrate therein or when a substrate is transferr
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