For example, in an application such as manufacture of the magnetic recording medium 1 illustrated in FIG. 1, the three (3) illustrated deposition stations including target/cathode assemblies 3, 6, and 7 may be utilized for successive deposition of a polycrystalline, Cr-based underlayer 12, a Co-based magnetic recording layer 13, and a diamond-like carbon-based protective overcoat layer 14.