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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • An integrated circuit, comprising: a structure, comprising, a monolithic semiconductor body having an outer surface, and a buried cavity disposed in the body and including an inner surface having a first portion that is a first distance from outer surface and having a second portion that is a second distance from the outer surface. 33.
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