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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • Any process during the fabrication of TMR magnetic transducer 335, which exposes TMR stack 412 to a ionizing process such as sputter etching, ion milling, or reactive ion etching (RIE), can possibly damage TMR stack 412, such as creating oxygen vacancy 465.
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