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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • A polishing pad 113 is fixedly held on the upper surface of the first table 103A, wherein the polishing pad 113 is formed by sticking synthetic resin such as polyurethane having many pores on the surface thereof on the surface of the first table 103A. There is provided a wafer carrier 115 that is moved vertically and driven to be rotated in a horizontal plane by a drive mechanism 114.
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