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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • An imprint apparatus uses a mold on which a fine pattern is formed as an original, and presses the mold against a resin (imprint material) dispensed on a substrate such as a silicon wafer or a glass plate to transfer the pattern of the mold onto the substrate, thereby forming a fine pattern on the substrate.
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