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  • Dopants such as Si (n-type) and Be, Mg or Zn (p-type) may be added as impurities in the source GaN. Alternatively, the dopants may be added as metals, salts, or inorganic compounds, such as Si, Si3N4, SiCl4, BeF2, Mg3N2, MgF2, Zn, ZnF2, Zn3N2, and the like.
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