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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • am of light to a main surface of a semiconductor wafer; light collecting means including a light collecting portion having a first light reflectance and a reflection adjustment portion made of a liquid crystal having a second light reflectance different from said first light reflectance, for collecting beams of light scattered from the main surface of said semiconductor wafer; light receiving mean
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