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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • a number of transistors in an array on a substrate, each transistor having a body region between a source region and a drain region, at least one transistor including a gate coupled to a dielectric film disposed above the body region, the dielectric film containing a layer of Zr???Sn???Ti???O, the layer of Zr???Sn???Ti???O having a surface with a roughness less than a monolayer of the Zr???Sn???Ti
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