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  • Patent CitationsCited PatentFiling datePublication dateApplicantTitleUS6235648 *Sep 25, 1998May 22, 2001Sanyo Electric Co., Ltd.Semiconductor device including insulation film and fabrication method thereofUS6255732Aug 3, 1999Jul 3, 2001Nec CorporationSemiconductor device and process for producing the sameUS6627532 *Oct 5, 2000Sep 30, 2003Applied Materials, Inc.Method of decreasing the K value in S
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