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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • a light illuminating system for relatively scanning the surface of the faceplate by irradiating the surface with a light beam having width in a direction perpendicular to a main scanning direction; a first light receiver composed of an arrangement of n light receiving elements, where n is an integer equal to or larger than 2; an optical system for focusing an image of a scanning position on the fa
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