About: isa:379731256   Sponge Permalink

An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

AttributesValues
rdf:type
prov:value
  • afer or an lcd substrate, to a plasma process, such as an etching process or the like.US6016131May 3, 1999Jan 18, 2000Applied Materials, Inc.Inductively coupled plasma reactor with an inductive coil antenna having independent loopsUS6043608Oct 31, 1997Mar 28, 2000Nec CorporationPlasma processing apparatusUS6089182Sep 30, 1997Jul 18, 2000Tokyo Electron LimitedPlasma processing apparatusUS6093457Mar
prov:wasQuotedFrom
is prov:wasDerivedFrom of
Alternative Linked Data Views: ODE     Raw Data in: CXML | CSV | RDF ( N-Triples N3/Turtle JSON XML ) | OData ( Atom JSON ) | Microdata ( JSON HTML) | JSON-LD    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3217, on Linux (x86_64-pc-linux-gnu), Standard Edition
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2012 OpenLink Software