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  • .Nano-crystal etch processUS8970329Dec 28, 2011Mar 3, 2015Nokomis, Inc.Component having a multipactor-inhibiting carbon nanofilm thereon, apparatus including the component, and methods of manufacturing and using the componentUS20080224426 *Mar 14, 2008Sep 18, 2008Suss Microtec Test Systems GmbhChuck with triaxial constructionUS20100105211 *Dec 30, 2009Apr 29, 2010Ramakanth AlapatiNano-crystal etch
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