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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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prov:value
  • a plate of unalloyed or alloyed aluminum, having recesses in the form of trenches or cavities formed on at least one major surface thereof and having an array of through holes, an oxide layer covering at least said major surface including said recesses and a surface of said holes, a network of equipotential electrically conductive connection tracks on said major surface; electronic microcomponents
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