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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • a transistor including a gate formed over the device formation region of the silicon layer defined by the isolation layer, source and drain regions formed at the both side of the gate in the device formation region, and a channel region which is a portion of the device formation region between the source and drain region; a conduction layer being contacted with the buried oxide layer; an impurity
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