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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • a semiconductor substrate; a conductive portion formed on the semiconductor substrate; a metal film formed on the conductive portion, the metal film having a bottom surface including both a contacting area with the conductive portion and a non-contacting area with the conductive portion; a gold plate portion formed on an entire upper surface of the metal film; an inter-layer insulation film formed
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