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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • g portions so that said substrates in said cassette are changed between a vertical state and a horizontal state; and a running mechanism for running said moving body so that said cassette supported on said first and second supporting portions move between inside and outside said processing unit; said rotating mechanism including a rotating shaft for rotating said first and second supporting portio
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