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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • Those surface defects contribute to an initial surface roughness at an interface surface I of a subsequent layer 117 that is deposited on the layer 115 in a deposition order DO. As was mentioned previously, those surface defects can be caused by a planarization process such as CMP or the like.
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