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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • d, and (c) a solvent in which the polymer and the photo acid generator is soluble, the polymer being a terpolymer represented by a following general formula (I) wherein n represents a positive integer ranging from 5 to 1000 both inclusive, R1 , R2 and R3 each represents a hydrogen atom or a methyl group, R4 is a group selected from a group consisting of a tricyclodecanyl group, a dicyclopentenyl g
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