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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • A MEMS device comprising an array of two or more longitudinal elements positioned on a substrate, and positioned side by side, the elements being at least in part electrically conductive, and including means for applying a voltage across the elements, wherein the elements are connected to the substrate at lower longitudinal sides thereof and of such nanometric dimensions and materials that the ele
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