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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • depositing a layer of barrier material over the surface of said second etch stop layer, including inside surfaces of said via extended through said first layer of dielectric and said interconnect line pattern extended through said second layer of dielectric and partially through said first etch stop layer; depositing a layer of metal over the surface of said barrier layer; and removing excess meta
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