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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • urce/drain regions could be masked to allow only the unmasked portions of the source/drain regions to be silicided; the silicide could be formed prior to the doping of the source and drain regions; and any number of different materials could be used to form the silicide including Ti, W, Cr, Mo, Ta, Pt, Pd, Co or other silicide forming metal.
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