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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • Next, the wafer pattern is positioned at a portion including only lines in the y direction as shown in FIG. 19B by the manual operation of the operator who views the image on the monitor unit 156 which is set to receive the output of the sensor (C) 151 or by the program stored in the total controller 10.
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