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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • said semiconductor element is a memory element including a MOS transistor and a capacitor electrically connected to said MOS transistor, said first wiring layer is a gate wiring layer, said mark structure has the same structure of a gate of said MOS transistor, and said second wiring layer is a cell plate of said capacitor. 7.
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