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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • A method of manufacturing a mask structure for fabrication of a device, comprising the steps of:preparing a preliminary pattern corresponding to said device which includes a combination of at least one pattern transparent to exposure light and a background opaque to the exposure light; dividing said pattern into n area portions where n is an integer not smaller than 2; forming n groups of identica
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