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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • A method for forming a hard protective film material having the empirical formula: Cx Ny comprising: providing a sputter apparatus including a vacuum chamber and incorporating therein a carbon target and a deposition substrate, providing within said vacuum chamber an inert sputter gas including nitrogen, applying an electric field in the region of said target for ionizing said sputter gas and caus
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