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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • A method for defining, on an upper surface of a substrate, two self-aligned areas, including the steps of: depositing a protective layer; depositing a covering layer; opening the protective and covering layers at a location substantially corresponding to a desired border of the two areas; forming a spacer along the edge of the opening, the spacer having a rear portion against said desired border a
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