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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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prov:value
  • A method for performing a process on a semiconductor wafer contained in a lot, comprising the steps of:scanning a bar code associated with said wafer using a bar code reader connected to a workstation controller, said bar code including lot information identifying said wafer; providing said lot information to said workstation controller; sending a request from said workstation controller to a host
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