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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • The system of claim 7 wherein each subarray of the transducer cells comprises a plurality of cMUT transducer cells formed over a semiconductor layer, said layer including a surface over which a metallization structure is formed to electrically connect each transducer cell to one of the circuit cells.
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