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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • The input device is a device for inputting an instruction of start and stop, or an instruction about the operation condition, required for controlling the conditions including at least the illuminance and the substrate feed rate, and then converting it to a signal (generating an instruction signal), and transmitting the instruction signal to a control unit or the transmitting unit.
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