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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • The first metal carrier 202 a includes a metal having a low CTE, for example, SUS304, Invar, or Kovar, in order to protect the substrate from deformation, including extension or warping, due to changes in atmospheric temperature or differences in process temperatures.
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