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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • The surface of the wafer 64 includes a surface region where the silicon, which is a material for the wafer 64, is exposed to the air and a surface region where the insulating film such as silicon oxide (SiO2) film or silicon nitride (Si3N4) film is exposed to the air.
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