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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • an array of deflectable reflective micromirrors held on a substrate, wherein each micromirror is attached to a deformable hinge that is disposed in a separate plane of the micromirror such that the micromirror is operable to be rotated to an ON state and an OFF state, wherein the OFF state is a state where the micromirror is parallel to the substrate;
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