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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • However, a material having a heat resistance is used and the conductive layer may be made of an element selected from the group consisting of Ta, W, Ti, Mo, Cu, Cr, and Nd, an alloy material mainly containing the element, or a compound material mainly containing the element.
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