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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

AttributesValues
rdf:type
prov:value
  • On the other hand, the inspection unit in this second embodiment includes an interface 68 and a buffer memory 69 that accept process information 19 such as the exposure system information (system characteristics data and such data as exposure conditions, etc.), resist information, etc. respectively.
prov:wasQuotedFrom
is prov:wasDerivedFrom of
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