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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • The invention relates to a silicon (Si) substrate or the like for manufacturing an electronic device, and more particularly to an electronic device that is manufactured by aligning elements formed on a front surface thereof and elements formed on a back surface thereof with high precision, a manufacturing method thereof, and a silicon substrate for the electronic device.
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