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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • 2000Oct 26, 2004Harris CorporationMethod for making electronic devices including silicon and LTCC and devices produced therebyUS6888233Mar 10, 2003May 3, 2005Honeywell International Inc.Systems for buried electrical feedthroughs in a glass-silicon MEMS processUS6897125Sep 17, 2003May 24, 2005Intel CorporationMethods of forming backside connections on a wafer stackUS6906395 *Aug 22, 2002Jun 14, 20
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