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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • cond additional step being performed for forming the movable contact electrode and the movable driving electrode on the membrane; wherein in the membrane forming step, an opening corresponding in position to the stationary contact electrodes is formed in the membrane, the movable contact electrode including a portion extending through the opening to face a relevant one of the stationary contact el
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