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  • cron Technology, Inc.Carrier assemblies, polishing machines including carrier assemblies, and methods for polishing micro-device workpiecesUS70371799 May 20022 May 2006Micron Technology, Inc.Methods and apparatuses for making and using planarizing pads for mechanical and chemical-mechanical planarization of microelectronic substratesUS7037403 *14 Aug 19982 May 2006Applied Materials Inc.In-situ rea
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