About: isa:49973357   Sponge Permalink

An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

AttributesValues
rdf:type
prov:value
  • computer for a current process step to be performed on said wafer, said request including said lot information; determining in said host computer said current process step according to said lot information; sending information from said host computer to said workstation controller indicating said current process step; sending process information from said workstation controller to a tool indicati
prov:wasQuotedFrom
is prov:wasDerivedFrom of
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