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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • The wiring layer 22 is made up of a layer composed mainly of Al or a layer composed mainly of W, and the first metal pattern 11 a is formed by patterning after forming the adhesion layer 21 and the wiring layer 22 in that order.
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